Low Loss Micromachined Lead Zirconate Titanate, Contour Mode Resonator with 50ohm Termination

This paper reports lead zirconate tit silicon electromechanical resonators wit terminated, performances for RF appl 2.14 dB insertion loss is demonstrat extensional, PZT-on-2-μm-silicon 15 M 22 dB return loss and maximum unload QUL,max, of ~540 in air resulted for this r performances with a QUL,max of demonstrated with a PZT fabricated device. The competing effects of de resistance and increased transducer c increased transduction area are ad analytical models and experimental resu a third order length extensional m resonator with asymmetric input and were also designed to assess its potential piezoelectric resonant transformer; a 2.1 demonstrated for a 14.7 MHz extensiona INTRODUCTION Prior RF-MEMS resonator rese promising device performances for RF wide frequency range [1-7]. Their poten references and narrow band RF filters s promise while preserving the conto advantages of MEMS, i.e. single-chip integration. In addition, integrated reso transformers have been explored transformers for impedance matching in [8] as well as voltage and power transfo applications such as high frequency swit supplies [9] [10]. Resonators with low motional motivated by the desire for low loss an devices. Thin film piezoelectric mater and aluminum nitride have demonstra resistances due to the transducers’ high coupling. PZT is an attractive choic resonators and resonant transformers electromechanical coupling factors and The high field PZT non-linearity also a field tuning of the dielectric, elas constants and coupling factors; en frequency tuning which is an attractiv systems. In the current article, we report extensional mode PZT on silicon excellent performance. Low insertion and high return losses (~22 dB) are rep the lowest insertion and highest return termination reported for thin-film PZT the authors’ best knowledge, for thin-fi piezoelectric resonators. Analytically HINED LEAD ZIRCONATE TITANA ONATOR WITH 50Ω TERMINATIO .G. Polcawich, D. Judy, A. Gillon, S. Bhav arch Laboratory, Adelphi, Maryland 20783, tory, Cornell University, Ithaca, New York 1